202122/547 Supply of up to four dry etch and deposition systems
University of Leeds
- Value
- Not stated
- Closing date
- —
- Published
- 24 Aug 2023
- Status
- complete
- Region
- UKE42
- Postcode
- LS2 9JT
- Category
- goods
- CPV
- 22520000 — Dry-etching equipment
Description
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)